CM-4 Simple Probe Station

The CM series probe stations feature a compact design, high measurement accuracy, and user-friendly operation, all in compliance with ergonomic principles.

It is primarily used for I‑V, C‑V, and PIV testing in the semiconductor and optoelectronics industries.

It is widely used in the research and development of precision electrical measurements for complex, high-speed devices.

Category:

CM Series Simple Probe Station

Purchase Message

Description
Parameters
Download
Video

CM Series | CM-4 Simple Probe Station

Basic Information

Product model	CM-4 Series	Applicable wafer	4-inch wafer
Electricity demand	AC 220V±10% / 50Hz	Control method	Manual
Typical user	University laboratories, research institutes, and small- and medium-sized chip design	Application Type	DC, optoelectronic, and electrical property testing of materials

Application Areas

The CM-4 is designed for manual electrical and optoelectrical testing of chips, wafers, and devices up to 4 inches in size. With its compact design and excellent cost‑performance ratio, it is primarily suited for laboratory R&D, small‑batch verification, and failure analysis, but is not ideal for large‑scale, automated production testing.

Technical Features

1. High precision

XY 10 μm, rotation 0.1°, stage flatness 5 μm

2. Strong Versatility

4 inches, 360° rotation, back electrode, 6‑probe socket, optoelectronic/RF compatible

3. Stable and reliable

Stainless steel, coaxial lead screw, strong vacuum adsorption, low leakage design

Structural Features of CM-4

Technical specifications	Model	CM-4
Truncated pyramid	Chuck size	4 inches
	Sample stage rotation	Rotates 360 degrees, with fine adjustment capability of 15 degrees and precision down to 0.1 degree—equipped with an angle-lock mechanism.
	Sample Fixing Method	Vacuum adsorption, central suction port, multi-ring adsorption ring
	X-Y Travel Distance	2 inches x 3 inches
	X-Y Motion Accuracy	10um
	Needle holder platform	One needle holder platform on each side, capable of holding up to 6 small probe holders.
	Back Electrode Testing	The sample stage is electrically isolated and suspended, with a 4mm jack available for connecting the back electrode (optional).
Microscope	Microscope Mounting Method	Pillar-rotating type
	Microscope Types	Single-lens microscope	Stereo Microscope
	Magnification power	0.75x-5x zoom	16X-100X
	Light source	Coaxial light source	External LED Ring Light
	CCD	2-megapixel (upgradeable to 20-megapixels)
Probe holder	X-Y-Z Travel Distance	12mm x 12mm x 12mm / 20mm x 20mm x 20mm
	Mobile precision	10um/2um/0.7um/0.5um
	Adsorption method	Magnetic adsorption / Vacuum adsorption
Probe Fixture	Cables	Coaxial cable / Triaxial cable / RF cable
	Leakage current accuracy	10pA/100fA/10fA
	Fixed probe	Spring fixation / Tubular fixation / Claw-type fixation
	Connector Type	BNC / Three-axis / Banana Plug / Alligator Clip / Terminal Block / RF Connector
Probe	DC needle tip diameter	lum/2um/5um/10um/20um/50um/100um
	RF probe frequency	40GHz/50GHz/67GHz/110GHz
	Material	Tungsten steel / Beryllium copper / Nickel-plated
External dimensions		400W x 370D x 490H
Weight		Approximately 18 kilograms
Optional accessories		Heating stage	Gold-plated chuck
		Seismic-resistant desk	Shielding box
		Customized according to customer requirements

Wafer Chuck( Standard)

Connectivity	Coaxial BNC (m)
Diameter	203mm
Material	Nickel-plated Oxygen-Free Copper (gold plating optional)
Chuck Surface	Zone Selector Knob with Pinhole Vacuum Pattern
Vacuum Hole Pattern Cross Section (Diameter)	Centers，1in，4in，6in，8in
Vacuum Actuator	Selector Knob Allows Individual Activation of Vacuum Zones
Supported DUT sizes	10mm、25mm、100mm、150mm、200mm
Surface flatness	±5µm
Rigidity	<3µm / 10N at chuck edge
Electrical Specifications (Coaxial Cable)
Operating Voltage	Designed for operation at -200V to + 200V DC
Maximum voltage between top of chuck and GND	10K V DC
Resistance to ground	> 150 GΩ

Wafer Chucks (Tri-Axis)

Connectivity	Triax (m)
Diameter	203mm
Material	Gold-plated brass
Chuck surface	Separate vacuum zone with pinhole vacuum pattern
Vacuum Hole Pattern Cross Section (Diameter)	Center，1in，4in，6in，8in
Vacuum Drive	Multi-zone adjustable control
Supported DUT sizes	10mm、25mm、100mm、150mm、200mm
Surface Flatness	± 5 Microns(µm)
Rigidity	<3µm / 10N Near chuck edge

High Temperature Chucks

		200mm	200mm Triax	200mm 3kV Triax
Temperature Range		+25°C ~+300°C	+25°C ~ +200°C	+25°C ~+200°C
Connectivity		Coaxial Cable (m)	Triax (m)	SHV Triax (m)
Temperature Control		Liquid Cooling/Resistance Heater
Coolant		Water
Minimum temperature selection step		0.1°C	0.1°C	0.1°C
Chuck Temperature Display Resolution		0.01°C	0.01°C	0.01°C
Temperature Stability		±0.1°C	±0.1°C	±0.1°C
Temperature Accuracy	±0.5°C		±0.5°C	±0.5°C
Controls	Low noise DC/PID
Interface	RS485		RS485	RS485
Chuck Surface Plating	Nickel		Gold
Temperature Sensor	Thermistor
Temperature Uniformity	±0.5°C @ ≤ 200°C ±1. °C @> 200°C		±0.5°C ≤ 100°C ±2.5°C ≤ 200°C	±0.5°C ≤ 100°C ±3.5°C ≤ 200°C
Surface Flatness	< ±1 µm		< ±5µm	< ±10µm
Electrical isolation - Coax BNC (m) / SHV Triax	150nA		> 5TΩ	> 5TΩ
Heating rate	25°C ~ 300°C < 12 Min.		25°C ~200°C < 9 Min.	25°C ~ 200°C < 28 Min.
Leakage@ 10V Kelvin Triax	N/A		<100fA	<10pA
Maximum voltage between top of chuck and GND	500V		500V	3kV
Safety circuits	Yes		Yes	Yes
Vacuum mode	Rings		Rings	Rings
Vacuum zone (DUT size)	50、100、150、200mm		50、100、150、200mm	50、100、150、200mm